High-Energy Ion Implanter PRODUCTS Ion Implanter SMIT provides the HE3 series as a high-energy ion implanter which uses a multi-stage RF linear accelerator system We have also started to provide the S-UHE single-wafer ultra-high energy implanter that enables implantation in an ultra-high energy region exceeding the energy range covered by conventional high-energy implanters and with
PRODUCTS Ion Implanter - Sumitomo Heavy Industries Ion Technology Co. , Ltd. SMIT provides an all-in-one ion implanter featuring a wide energy dose range covering the combined ranges of conventional medium-current and high-current ion implanters and enabling many of the implantation processes in semiconductor device manufacturing to be processed with the implanter