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- CEA-MetroCarac cdsaxs - GitHub
CD-SAXS (Critical Dimension Small Angle X-ray Scattering) is a promising technique for nano-structure electronics It uses a transmission geometry, sending the beam through the sample and the 750 micrometer-thick silicon wafer The x-ray spot size varies between 10-1000 μm, enabling the measurement of small patterned areas
- CD-SAXS - GISAXS
Critical-Dimension Small-Angle X-ray Scattering (CD-SAXS) is an x-ray scattering technique that can be used to reconstruct the in-plane and out-of-plane structure of nanostructured thin-films The technique consists of collecting a series of transmission SAXS images, at a variety of sample rotation angles
- Critical Dimension Small Angle X-Ray Scattering (CDSAXS) for Next Generation in-line Metrology | NIST - National Institute of Standards and Technology
The NIST-developed CDSAXS method has recently been commercialized for characterization of 3D-NAND contact holes and has the potential to provide need measurements of gate-all-around (GAA) nanosheet transistor and through silicon vias (TSV)
- Three-dimensional x-ray metrology for block copolymer lithography line-space patterns - NIST
We report on the development of a new measurement method, resonant critical-dimension small-angle x-ray scattering (res-CDSAXS), for the characterization of the buried structure of block copolymers (BCP) used in directed self assembly (DSA)
- |. CD-SAXS operations and feature shape models. -a, diagram. . . | Download Scientific Diagram - ResearchGate
CD-SAXS is essentially single crystal diffraction where the lattice is the period of the structure and the 'atoms' are the repeating nanostructured elements CD-SAXS is analysed using an
- XTRAIA CD Series - Rigaku
CDSAXS X-ray CD metrology tools for grazing-incidence and transmission measurements for up to 300 mm
- Sample manuscript showing specifications and style
In this work, we present our first Small-Angle X-ray Scattering (SAXS) results of overlay measurements on stacks of silicon line gratings Our method, novel for SAXS overlay measurements, is based on inverse problem resolution and reconstructs the in-depth profile (approximated as a stack of trapezoids) of the structure
- AFL. automation. instrument. CDSAXSLabview
Perform a transmission measurement on the currently loaded sample Parameters: exp (float, default=5) – exposure time fn (string, default='trans') – file name to save the measurement in set_empty_transmission (bool, default=False) – set the currently-held
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